Here is the listing of Best reference books on Materials and Processes for Semiconductor Devices.
|1. “The Science and Engineering of Microelectronic Fabrication” by S. Cambell
Book Review: This book is suitable for upper level undergraduate and graduate courses in the field of material processes and semiconductor devices. The book also provides introduction to microfabrication.The book also demonstrates all the unit processes that are used for fabrication of integrated circuits and these include photolithography, plasma, ion implantation, diffusion, oxidation, evaporation and many more. The book also contains topics on rapid thermal processing, lithography, molecular beam epitaxy and others.
|2. “VLSI Fabrication Principles” by S.K. Ghandi
Book Review: This book contains a dedicated chapter on microelectromechanical structures (MEMS) which is the latest area in the field of micro fabrication. The book also covers basics of mechanics, stress occurrence in thin films, mechanical to electrical transduction, MEMS device mechanics, micromachining etching techniques, micromachining process flow, surface micromachining basics and process flow as well as high aspect ratio microsystems technology.
|3. “Modular Series and Solid State Devices” by Neudeck
Book Review: This book covers all the advancements in the field of material processes semiconductor devices. The book also covers the basic principles that revolve around the fabrication processes for semiconductor devices along with the integrated circuit chips that are made from silicon and gallium arsenide. The book also explains the criteria for CMOS, MOS, bipolar and FET circuits. The book introduces various technologies separately and then integrates it into complete circuits.
|4. “Modular Series and Solid State Devices” by Pierret
Book Review: The book deals with both the quantitative as well as qualitative aspects of semiconductor devices. The book also focuses on silicon based semiconductors that includes the treatment of basic semiconductor properties, quantum mechanics elements, energy band theory, equilibrium carrier statistics, generation processes, drift and diffusion carrier support and many more. This is a good book for self-study for scientists and engineers.
|5. “Thin Film Processes” by J.L. Vossen and W. Kern
Book Review: This book very clearly explains the concepts related to thin film deposition as well as etching processes. The book also discusses the processes that describe the literature involved. The book also explains all the details regarding modern thin film techniques. The book also stresses on the practical applications of major thin film deposition and etching processes. The book also helps readers to find out the suitable technology for a particular application.
Sanfoundry Global Education & Learning Series – Best Reference Books!