39 Best Books on Microelectromechanical Systems (MEMS)

We have compiled a list of the Best Reference Books on Microelectromechanical Systems (MEMS), which are used by students of top universities, and colleges. This will help you choose the right book depending on if you are a beginner or an expert. Here is the complete list of Microelectromechanical Systems (MEMS) Books with their authors, publishers, and an unbiased review of them as well as links to the Amazon website to directly purchase them. If permissible, you can also download the free PDF books on Microelectromechanical Systems (MEMS) below.

1. Introduction to MEMS

 
1."Microsystem Design" by Stephen D Senturia
Book Review: This book provides an approach to microsystem design, encompassing the multitude of challenges involved in scaling down entire systems to the micro and nano levels. The book covers a range of topics, including the development of integrated MOS photodiode arrays for visible imaging, the creation of thin diaphragms using silicon etching to convert pressure into an electrical signal, and the global advancements in microsystem technology. The research presented in the book focuses on the integration of sensors and circuits in the same chip to reduce costs, as well as the formation of diaphragms using selective anisotropic etching.

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2."Fundamentals of Microfabrication" by Marc Madou
Book Review: The book offers coverage of MEMS, encompassing both theoretical and practical information on nanotechnology and MEMS, as well as a detailed description of materials, processes, and manufacturing options. The book contains chapters on solid state physics, quantum mechanics, crystallography, and fluidics to demonstrate micro and nano sciences. It provides a range of techniques for micro and nano fabrication, including different forms of lithography, material removal processes, and various additive technologies.

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3."Micromachined Transducers Sourcebook" by Gregory Kovacs
Book Review: The book offers an introduction to micromachined transducers, starting with micromachining techniques and progressing to cover all major categories of transduction. It presents a practical approach to the subject, addressing key design issues and exploring the fabrication of various devices. This reference book is an ideal resource for MEMS researchers and graduate-level students, with detailed information on sensor and actuator classification included.

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4."Micromechanical Transducers: Pressure Sensors, Accelerometers and Gyroscopes" by M H Bao
“Micro Mechanical Transducers: Pressure Sensors, Accelerometers and Gyroscopes” Book Review: The book offers a brief yet comprehensive introduction to mechanical sensors based on silicon and explores related issues. It begins by providing a detailed account of stress and strain in beams and diaphragms, followed by an in-depth analysis of mechanical structure vibration and air damping. The book also delves into advanced topics such as capacitive and piezoresistive sensing techniques. Later chapters apply these principles to commercially available pressure sensors, accelerometers, and resonant sensors. Practicing engineers and designers can use this book as a guide to developing highly optimized devices.

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5."MEMS Introduction and Fundamentals" by Gad-El-Hak
“MEMS: Introduction and Fundamentals” Book Review: This book provides an extensive examination of the fundamental conceptual principles of MEMS, while also highlighting the dominant physical phenomena at the micro-scale. It delves deeply into the mechanical characteristics of MEMS materials, as well as modeling and simulating MEMS, control theory, and the transportation of bubbles/drops in microchannels. This edition also features dedicated chapters on microscale hydrodynamics and lattice Boltzmann simulations. Students and professionals alike can benefit from this comprehensive resource.

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6."Mem30004a - Introduction to Autodesk Inventor" by Warren Blackadder
“MEM30004A Introduction to Autodesk Inventor” Book Review: This book introduces the different techniques by which basic engineering drawings can be produced using a CAD system under supervision. The book focuses on producing three-dimensional models using computer-aided design software and associated equipment. The emphasis is placed on the implementation of region and solid modeling techniques, section views, and pre-drawn library files. The book also includes a detailed account of extracting properties and applying basic rendering techniques, concluding the comprehensive guide.

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7."Foundations of MEMS" by Liu
“Foundation of MEMS” Book Review: In this book, the author provides a systematic analysis of Microelectromechanical Systems (MEMS) using concepts from both mechanical and electrical engineering. The book delves into various challenges faced in the MEMS field, such as design, materials, and fabrication, while also exploring developing microfabrication technology. Practical examples and exercises are used to illustrate advanced topics and problems that require critical thinking skills. This book is an ideal resource for professionals, advanced undergraduate students, and beginning graduate students studying MEMS courses.

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8."MEMS AND Microsystems: Design And Manufacture" by Tai-Ran Hsu
“MEMS and Microsystems: Design and Manufacture” Book Review: This book is a comprehensive guide to understanding MEMS, microsystems, and micro technologies, designed for engineering students. It explores the fundamentals and potential of MEMS and microsystems using both electrical and mechanical techniques and concepts, with a focus on engineering design. With numerous case studies, examples, and practical problems, it covers a wide range of applications, including telecommunications, biomedical technology, manufacturing, and robotics. The book also includes chapters on design and manufacturing aspects of MEMS, as well as packaging considerations. This book is an essential resource for mechanical, electrical, and aerospace engineers interested in micro technologies such as solid mechanics, physics, and materials.

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9."Microelectromechanical Systems" by Dilip Kumar Bhattacharya and Brajesh Kumar Kaushik
“Microelectromechanical Systems (MEMS)” Book Review: This book provides a comprehensive explanation of the fundamentals of MEMS, along with their applications in microelectronics and microsystems. In addition to the basics, the book also delves into the details of various MEMS processing steps, such as diffusion, oxidation, epitaxy, ion implantation, chemical vapor deposition, and photolithography. The research on MEMS actuators and sensors is explored, along with device- and process-level TCAD simulations to provide insight into device performance prior to fabrication. The book also puts a significant emphasis on the needs of MEMS designers by discussing various MEMS-based systems, including micropumps, micromotors, microvalves, RF MEMS, microaccelerometers, and microfluidics.

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10."Digital Holography for MEMS and Microsystem Metrology" by Anand Asundi
“Digital Holography for MEMS and Microsystem Metrology” Book Review: This book provides discussion on digital holography for MEMS and microsystem metrology, including its basic concepts and applications. From an industrial inspection perspective, the book systematically analyzes the process of digital holography, its applications for residual stress measurement, design and evaluation, MEMS characterization, and device testing & inspection. It covers various types of digital holography, such as digital reflection holography, digital transmission holography, digital in-line holography, and digital holographic tomography, as well as their applications in areas such as bio-imaging, micro-optical and diffractive optical systems, and testing. The book is a valuable resource for both engineers and researchers looking to explore the potential of digital holography in existing machines and processes. The book provides examples of particle characterization and their applications in fields such as microfluidics, crystallization, and aerosol detection studies.

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2. Microelectromechanical Systems

 
1."Micro Electro Mechanical System Design (Mechanical Engineering)" by James J Allen
“Micro Electro Mechanical System Design (Mechanical Engineering) 1st Edition” Book Review: This book offers guide for developing successful micro electro mechanical system (MEMS) designs. It presents the design processes in a well-illustrated manner and covers the materials required for MEMS designers to apply them in a sequential manner. The topics covered in the book range from understanding fabrication technologies to focusing on engineering details. Each chapter includes questions and answers to reinforce learning, and an appendix is included for further reference. This book provides in-depth information necessary for MEMS designers to develop effective designs.

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2."MOEMS: Micro-Opto-Electro-Mechanical Systems" by Manouchehr E Motamedi
“MOEMS: Micro-Opto-Electro-Mechanical Systems (SPIE Press Monograph Vol. PM126)” Book Review: This book is a comprehensive guide on the principles and applications of MOEMS. The book covers topics such as microfabrication techniques, optical and mechanical components, microactuators, microsensors, and their integration. It also discusses various applications of MOEMS in areas such as optical communications, displays, biomedicine, and sensing. This book is suitable for researchers, engineers, and graduate students interested in the field of MOEMS.

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3."Slow Rarefied Flows: Theory and Application to Micro-Electro-Mechanical Systems (Progress in Mathematical Physics)" by Carlo Cercignani
“Slow Rarefied Flows: Theory and Application to Micro-Electro-Mechanical Systems (Progress in Mathematical Physics (41))” Book Review: The book presents the theory and application of rarefied gas flows in micro-electro-mechanical systems (MEMS). The book covers topics such as the Boltzmann equation, modeling of gas flows, microscale heat transfer, and microscale flow phenomena. The book also discusses the application of these theories in the design and optimization of MEMS devices. This book is suitable for graduate students and researchers in the field of MEMS and fluid mechanics.

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4."Smart Materials Fabrication and Materials for Micro-Electro-Mechanical Systems: Volume 276 (MRS Proceedings)" by A Peter Jardine and Andrew Crowson
“Smart Materials Fabrication and Materials for Micro-Electro-Mechanical Systems: Volume 276 (MRS Proceedings) 1st Edition” Book Review: This book covers the latest research in the field of micro-electro-mechanical systems (MEMS). The book includes topics such as smart materials, fabrication processes, and characterization techniques for MEMS. It also discusses the use of MEMS in various applications, including sensors, actuators, and microfluidic devices. This book is a valuable resource for researchers and engineers in the field of MEMS and smart materials.

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5."Fabrication Techniques for III-V Micro-Opto-Electro-Mechanical Systems" by Jeremy A Raley
“Fabrication Techniques for III-V Micro-Opto-Electro-Mechanical Systems” Book Review: This is a useful book for researchers and students interested in MEMS fabrication techniques. It covers the fabrication and assembly techniques of III-V semiconductors, as well as micro-opto-electro-mechanical systems (MOEMS) fabrication. Topics include epitaxy, lithography, etching, and bonding techniques. The book is a valuable resource for those working on the development of MOEMS and MEMS in the field of optoelectronics.

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3. RF MEMS

 
1."Rf Mems: Theory, Design, and Technology" by Gabriel M Rebeiz
“Rf Mems: Theory, Design, and Technology” Book Review: This book provides a comprehensive overview of RF MEMS technology, covering both theory and practical applications. Topics covered in this book include MEMS switches and varactors, MEMS transmission lines, MEMS inductors and transformers, MEMS resonators and filters, and packaging techniques for MEMS devices. This book is ideal for graduate students, researchers, and professionals in the field of RF MEMS.

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2."RF MEMS Switches and Integrated Switching Circuits (MEMS Reference Shelf)" by Ai-Qun Liu
“RF MEMS Switches and Integrated Switching Circuits (MEMS Reference Shelf)” Book Review: This book is a compilation of research papers on the subject, providing a combined approach that includes RF MEMS approaches. It covers the latest developments, from RF MEMS switches to RF switching circuits and MEMS switch components in circuit systems. The book focuses on engineering innovation, design, modeling, fabrication, and control, as well as experimental experimentation. It discusses RF switch system and component-level circuit integration, and uses micro- and nano-fabrication techniques. The book gives significant importance to design innovation and experiments. It is an essential resource for engineers, researchers, and students working in the fields of MEMS, circuits and systems, and RFs.

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3."Practical MEMS: Analysis and Design of Microsystems, MEMS Sensors" by Ville Kaajakari
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4."Mixed-Domain Simulation and Wafer-Level Packaging of RF-Mems Devices" by Jacopo Iannacci and Roberto Gaddi
“Mixed-Domain Simulation and Wafer-Level Packaging of RF-Mems Devices” Book Review: The book addresses two major challenges in the field of MEMS: modeling their multi-physical behavior and packaging/encapsulation of such devices. To address the first issue, the book provides the development of compact models for MEMS behavior, allowing for fast and accurate simulations within commercial IC development frameworks. For the second issue, the book discusses technology solutions such as the Wafer-Level-Packaging approach. The book also covers the modeling, simulation, and integration of RF-MEMS. It is an essential read for scientists, researchers, designers, and technologists in the field.

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5."RF-Mems: A Technological Aspect" by Singh Tejinder Pal
“RF-Mems: A Technological Aspect” Book Review: The book provides an in-depth understanding of the subject and is intended for both graduate and postgraduate students as well as engineers. The focus is on presenting the basics of the subject in a detailed yet simple way, covering topics such as materials, micro-fabrication, packaging, market trends and future prospects. The book includes case studies, diagrams, and tables to aid in comprehension. It is suitable for students of Physics and Electronics Engineering, as well as researchers in the field.

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6."Capacites Variables Et Inductances Mems RF" by Mehdaoui Alexandre
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7."RF MEMS Circuit Design for Wireless Communications (Artech House microelectromechanical systems series)" by Hector J de Los Santos
“RF MEMS Circuit Design for Wireless Communications (Artech House microelectromechanical systems series)” Book Review: This book provides an overview of RF MEMS-based circuits design and their applications in high-performance wireless systems. It aims to help readers understand the practical applications of this field. The book covers a wide variety of RF MEMS devices and their performance levels. It also discusses the architecture of wireless systems, which can improve the system’s performance while reducing power requirements. The target audience for this book includes microwave engineers and managers, as well as electrical engineering professors and students.

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8."Advanced RF MEMS (The Cambridge RF and Microwave Engineering Series)" by Stepan Lucyszyn
“Advanced RF MEMS (The Cambridge RF and Microwave Engineering Series)” Book Review: This advanced book covers the latest theory and applications in RF MEMS technology in an engaging manner. It is suitable for professionals, researchers, and students seeking a comprehensive understanding of the field. It addresses longstanding issues related to reliability and packaging, providing solutions to enable the integration of RF MEMS into commercial products.

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4. MEMS and Microsystems Technology

 
1."Radioisotope Thin-Film Powered Microsystems (MEMS Reference Shelf)" by Rajesh Duggirala and Amit Lal
“Radioisotope Thin-Film Powered Microsystems (MEMS Reference Shelf)” Book Review: The book is a guide on energy density microbatteries essential for creating compact and long-lasting wireless sensor microsystems. It covers the theoretical aspects of high energy density radioisotope thin films and their application in novel wireless sensor architecture to enable long-lasting sensors. The book also delves into the ultra-low power beta radiation counting clocks and their usage. The application of radioisotope thin films is also highlighted. This book is useful for researchers, professionals, and students interested in the field of energy density microbatteries and wireless sensor systems.

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2."Design and Manufacturing of Active Microsystems (Microtechnology and MEMS)" by Stephanus Büttgenbach and Arne Burisch
“Design and Manufacturing of Active Microsystems (Microtechnology and MEMS)” Book Review: This book presents the design and manufacturing processes of active microsystems, which are the result of collaborative research conducted at Center 516. The research focuses on the development of electromagnetic actuator-based systems, which can travel several millimeters despite having a total construction size of several centimeters. The fundamental process chains of microsystems are incorporated into the models used in the research.

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3."Surface Tension in Microsystems: Engineering Below the Capillary Length (Microtechnology and MEMS)" by Pierre Lambert
“Surface Tension in Microsystems: Engineering Below the Capillary Length (Microtechnology and MEMS)” Book Review: This book covers the design and manufacturing of active microsystems, with a focus on the electromagnetic actuator principle as investigated in collaborative research center 516. The actuator system under investigation travels on the order of several millimeters and has a total construction size of several centimeters. The book also discusses the effects of surface tension and capillary bridges on miniaturized products and their applications, including capillary adhesion, centering force in packaging, micro assembly, and capillary motor. The use of surface tension in actuation, sealing, tightness, and energy harvesting is also illustrated.

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4."Optimal Synthesis Methods for MEMS (Microsystems)" by S G K Ananthasuresh
“Optimal Synthesis Methods for MEMS (Microsystems)” Book Review: This book is a comprehensive guide to the synthesis of Micro-Electro-Mechanical Systems (MEMS). The book covers various synthesis methods, including top-down and bottom-up approaches, and discusses design optimization techniques. The book also explores several application areas of MEMS, including accelerometers, gyroscopes, and bio-MEMS. This book is ideal for researchers, engineers, and graduate students interested in the design and fabrication of MEMS.

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5."Piezoelectric MEMS Resonators (Microsystems and Nanosystems)" by Harmeet Bhugra and Gianluca Piazza
“Piezoelectric MEMS Resonators (Microsystems and Nanosystems)” Book Review: The book provides an overview of the design, modeling, and fabrication of piezoelectric resonators for microelectromechanical systems (MEMS) applications. It discusses the underlying physics of piezoelectricity and its use in resonator design. The book covers various types of resonators, including bulk, surface, and flexural mode resonators. It also includes discussions on fabrication techniques, such as thin-film deposition and lithography. This book is useful for researchers and engineers interested in the design and fabrication of piezoelectric MEMS resonators.

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6."Bonding in Microsystem Technology (Springer Series in Advanced Microelectronics)" by Jan A Dziuban
“Bonding in Microsystem Technology (Springer Series in Advanced Microelectronics)” Book Review: The book provides a comprehensive overview of bonding techniques used in microsystem technology. It covers topics such as surface preparation, adhesives, soldering, welding, and fusion bonding. The book also discusses the advantages and disadvantages of each technique, providing readers with an understanding of how to select the most appropriate bonding method for their application. This book is a valuable resource for researchers and engineers in the field of microsystem technology.

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5. MEMS and Applications

 
1."Mems and Moems Technology and Applications" by Choudhury and Rai
“Mems and Moems Technology and Applications” Book Review: This book provides information on the design and manufacturing processes of MEMS and MOEMS technologies. It begins by exploring the numerous possibilities that micromachining technology offers. The book then delves into the operation and design of micromachines, including sensors and actuators. It also covers the growth of technology computer-aided design (TCAD) and modeling capabilities for MEMS and MOEMS. The book examines the development of digital light processing technology and the emerging field of guided wave MOEMS and planar waveguides. Lastly, the book presents a detailed treatment of the critical topic of assembly and testing for MEMS and MOEMS.

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2."Amorphous Silicon Carbide for Mems Applications" by Arnab Choudhury
“Amorphous Silicon Carbide for Mems Applications” Book Review: The book presents the evolution of MEMS manufacturing methods for amorphous Silicon Carbide (a-SiC), demonstrating its broad suitability for various MEMS applications owing to its high Young’s Modulus and chemical resistance to commonly used MEMS etchants. The book describes techniques for a-SiC patterning and investigates the integration of a-SiC MEMS devices with Stereolithography. It uses a microscaled four point probe as a test case to demonstrate the potential of a-SiC in MEMS.

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3."MEMS: Applications (The MEMS Handbook, Second Edition)" by Mohamed Gad-el-Hak
“MEMS: Applications (The MEMS Handbook, Second Edition)” Book Review: The book offers a precise and authoritative examination of particular areas of interest in microelectromechanical systems (MEMS), with a broad survey of current, emerging, and potential future applications. The content covers inertial sensors, micromachined pressure sensors, surface micromachined devices, microscale vacuum pumps, and more. The book discusses reactive control for skin-friction reduction and microchannel heat sinks, as well as microactuators and nonlinear electrokinetic devices. Numerous case studies, examples, figures, and illustrations are included to enhance comprehension of the material.

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4."CMOS Cantilever Sensor Systems: Atomic Force Microscopy and Gas Sensing Applications (Microtechnology and MEMS)" by D Lange and O Brand
“CMOS Cantilever Sensor Systems: Atomic Force Microscopy and Gas Sensing Applications (Microtechnology and MEMS)” Book Review: This book provides a comprehensive guide on the utilization of industrial CMOS processes for creating arrays of nanomechanical cantilever transducers with integrated driving and signal conditioning circuitry. It offers valuable insights into cantilever and resonant sensors, covering their design concepts, simulations, and prototypes, while utilizing CMOS-compatible micromachining. It explores the potential of combining IC fabrication technology, especially CMOS, with silicon micromachining. The book details the post-processing micro- or nano-machining techniques for finished CMOS wafers. It also discusses the practical use of resonant cantilevers for detecting volatile organic compounds and force sensor arrays for parallel scanning atomic force microscopy (AFM) of larger areas.

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5."Electronic Composites: Modeling, Characterization, Processing, and MEMS Applications" by Minoru Taya
“Electronic Composites: Modeling, Characterization, Processing, and MEMS Applications” Book Review: This book discusses the processing, simulation, and applications of electronic composites, which play a crucial role in micro- and nano-electromechanical systems (MEMS/NEMS). It highlights the ways in which the properties of electronic composites can be controlled through thermal or electromagnetic means, starting with an overview of their mechanical, thermal, electromagnetic, and coupling behavior. The book then examines their applications and describes key simulation models. Finally, it provides a detailed discussion of electronic composite processing, including MEMS design and packaging.

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6."Thermal Energy Harvesting for Application at MEMS Scale (SpringerBriefs in Electrical and Computer Engineering)" by Alex Post and Tim Moore
“Thermal Energy Harvesting for Application at MEMS Scale (SpringerBriefs in Electrical and Computer Engineering)” Book Review: This book provides an overview of the history of thermal heat generators with a focus on their potential in micro-electrical mechanical systems (MEMS) technology. It explores the use of waste thermal energy from various sources such as industrial processes, transport systems, and the human body to generate usable electrical power. The book covers various external combustion heat cycles such as Brayton, Stirling, and Rankine, as well as Thermoacoustic, Shape Memory Alloys (SMAs), Multiferroics, Thermionics, Pyroelectric, and other technologies. The book includes discussions on Seebeck, Alkali Metal Thermal, Hydride Heat Engine, and other related topics.

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7."MEMS-Based Integrated Navigation (GNSS Technology and Applications)" by Priyanka Aggarwal and Zainab Syed
“MEMS-Based Integrated Navigation (GNSS Technology and Applications)” Book Review: The primary focus of this book is to explore techniques for cost reduction in MEMS by adding or removing inertial sensors. It begins with an overview of MEMS navigation applications and delves into specialized topics related to alignment. The book provides detailed discussions on Extended Kalman Filter and presents practical references with integration strategies based on real-world field tests. The majority of the book is dedicated to the application of MEMS inertial sensors in navigation systems.

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8."Principles and Applications of Nano MEMS Physics" by Hector J De Los Santos
“Principles and Applications of Nano MEMS Physics” Book Review: The book discusses the underlying physical principles of Nano MEMS devices and their applications. It begins by introducing the basics and limitations of nanotechnology and MEMS fabrication techniques. The text then explores the physics related to quantum wave-particle phenomena, including charge discreteness, quantized electrostatic actuation, and the Casimir effect. Quantum wave phenomena such as quantized electrical conductance, quantum interference, Luttinger liquids, quantum entanglement, superconductivity, and cavity quantum electrodynamics are discussed. The book also examines potential components for Nano MEMS applications, such as nano electromechanical quantum circuits and systems, charge detectors, the which-path electron interferometer, and the Casimir oscillator. The book also explores Nano MEMS applications in photonics.

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9."RF MEMS and Their Applications" by K J Vinoy and Vijay K Varadan
“RF MEMS and Their Applications” Book Review: This book focuses on the information requirements shared by the RF and MEMS research and development communities. It begins by introducing micromachining techniques, and discusses their application in the fabrication of micro switches, capacitors, and inductors. It also explores the use of MEMS devices for wireless and Bluetooth enabled systems, making it a useful resource for RF circuit design. The book delves into the development of RF MEMS switches and the efforts to lower their actuation voltage. It also explains the technology behind micromachined antennas, and covers the design and development of RF MEMS-based inductors, capacitors, filters, and phase shifters.

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10."MEMS: Fundamental Technology and Applications (Devices, Circuits, and Systems)" by Vikas Choudhary and Krzysztof Iniewski
“MEMS: Fundamental Technology and Applications (Devices, Circuits, and Systems)” Book Review: This book provides a theoretical foundation and practical insights on the application of MEMS technology across various areas of interest, ranging from the historical evolution of nano micro systems to recent trends. It identifies challenges and presents questions that require resolution. The book also explores alternative solutions, such as thin-film integrated passives as an alternative to discrete passives and the potential for piezoelectric MEMS. It delves into various topics, including MEMS gyroscopes, advanced interconnect technologies, ambient energy harvesting, bulk acoustic wave resonators, ultrasonic receiver arrays using MEMS sensors, and optical MEMS-based spectrometers. The book also covers topics such as wireless microactuators for implantable MEMS devices for drug delivery, MEMS technologies for tactile sensing and actuation in robotics, and MEMS-based micro hot-plate devices, among others.

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We have put a lot of effort into researching the best books on Microelectromechanical Systems (MEMS) and came out with a recommended list and their reviews. If any more book needs to be added to this list, please email us. We are working on free pdf downloads for books on Microelectromechanical Systems (MEMS) and will publish the download link here. Fill out this Microelectromechanical Systems (MEMS) books pdf download" request form for download notification.

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