39 Best Books on Microelectromechanical Systems (MEMS)

We have compiled a list of the Best Reference Books on Microelectromechanical Systems (MEMS), which are used by students of top universities, and colleges. This will help you choose the right book depending on if you are a beginner or an expert. Here is the complete list of Microelectromechanical Systems (MEMS) Books with their authors, publishers, and an unbiased review of them as well as links to the Amazon website to directly purchase them. If permissible, you can also download the free PDF books on Microelectromechanical Systems (MEMS) below.

1. Introduction to MEMS

1."Microsystem Design" by Stephen D Senturia
Book Review: This book brings together all the aspects of microsystem design thereby addressing the complex range of problems that are involved in reducing entire systems to the micro and nano domains. The book describes integrated MOS photodiode arrays that are used for visible imaging, silicon etching thereby creating thin diaphragms that convert pressure into an electrical signal. It also discusses the worldwide development of microsystems. The book discusses the research work for forming integrated sensors which will reduce cost and integrating sensors and circuits in the same chip. It also discusses integrated MOS photodiode arrays for creating thin diaphragms. The book also highlights selective anisotropic etching which was used for diaphragm formation.
2."Fundamentals of Microfabrication" by Marc Madou
Book Review: The book provides complete coverage on MEMS. It includes theoretical and practical information on nanotechnology and MEMS and provides detailed information on materials, processes and manufacturing options. The book also provides demonstration of micro and nano sciences and contains chapters on solid state physics, quantum mechanics, crystallography and fluidics. The book also provides techniques for micro and nano fabrication and covers various forms of lithography, material removal processes and various additive technologies.

3."Micromachined Transducers Sourcebook" by Gregory Kovacs
Book Review: The book provides detailed overview of micromachined transducers starting with micromachining approaches and in the later stages covering all the major categories of transduction. The book also provides practical approach to this subject by dealing with key design issues thereby examining the fabrication of different devices. This book is a very good reference book for MEMS researchers and students at the graduate level. The book also provides classification about sensors and actuators.

4."Micromechanical Transducers: Pressure Sensors, Accelerometers and Gyroscopes" by M H Bao
“Micro Mechanical Transducers: Pressure Sensors, Accelerometers and Gyroscopes” Book Review: This book presents a concise introduction of silicon-based mechanical sensors and analyzes the various issues related to it. The book starts with a detailed description of stress and strain in diaphragms and beams, followed by a thorough treatment of vibration of mechanical structures as well as air damping. Advanced topics like capacitive and piezoresistive sensing techniques are also discussed in-depth. The subsequent chapters deal with the application of aforementioned principles on commercially available pressure sensors, accelerometers and resonant sensors. Designers or any practicing engineer can refer to this book to obtain highly optimized devices.

5."MEMS Introduction and Fundamentals" by Gad-El-Hak
“MEMS: Introduction and Fundamentals” Book Review: This book offers a comprehensive coverage of the underlying conceptual principles of MEMS along with focusing on the physical phenomena that dominate at the micro-scale. The book delves into the mechanical properties of MEMS materials, modeling and simulation of MEMS, control theory, and bubble/drop transport in microchannels in great detail. Separate chapters on microscale hydrodynamics and lattice Boltzmann simulations have also been included in this edition. Both students and professionals can refer to this book.

6."Mem30004a - Introduction to Autodesk Inventor" by Warren Blackadder
“MEM30004A Introduction to Autodesk Inventor” Book Review: This book introduces the different techniques by which basic engineering drawings can be produced using a CAD system under supervision. Readers will learn to produce three dimensional models using computer aided design, drawing software, and their associated equipment. The book emphasizes on the implementation of region and solid modeling techniques, section views, and pre-drawn library files. The book concludes with a detailed account on extraction of properties and application of basic rendering techniques.

7."Foundations of MEMS" by Liu
“Foundation of MEMS” Book Review: This book systematically analyzes the specifics of MEMS using concepts from both the mechanical and electrical engineering domains. The author incorporates developing microfabrication technology to discuss various issues faced in the MEMS field, such as designs, materials, and fabrication. Problems requiring critical thinking skills and advanced topics have been illustrated using numerous practical examples and exercises. This book is suitable for professionals, beginning graduate students, and advanced undergraduate students studying MEMS courses.

8."MEMS AND Microsystems: Design And Manufacture" by Tai-Ran Hsu
“MEMS and Microsystems: Design and Manufacture” Book Review: The book gives complete information on understanding MEMA, microsystems and micro technologies. The book is designed for engineering students. This book explores the fundamentals as well as potential of MEMS and microsystems in the real-world using electrical and mechanical techniques and concepts. Replete with case studies, examples and practical problems, this book approaches the subject from an engineering design perspective. Telecommunications, biomedical technology, manufacturing and robotic systems, transportation and aerospace are some of the major areas of applications of MEMS that are explored in this book. This book is ideal for mechanical, electrical, and aerospace engineers. It discusses micro technologies such as solid mechanics, physics and materials. The book covers chapters on design and manufacturing aspects of MEMS. It also discusses its applications in the field of telecommunications, biomedical device design, aerospace applications, etc,. The book also describes the packaging aspects of MEMS.

9."Microelectromechanical Systems" by Dilip Kumar Bhattacharya and Brajesh Kumar Kaushik
“Microelectromechanical Systems (MEMS)” Book Review: This book explains the fundamentals of MEMS and their applications in microelectronics and microsystems. Diffusion, oxidation, epitaxy, ion implantation, chemical vapor deposition, photolithography, and other MEMS processing steps are also discussed in detail. Research on applications of MEMS actuators and MEMS sensors is provided while device- and process-level TCAD simulations are added to provide insight into the device performance before an actual fabrication. The book also focuses on the needs of MEMS designers by putting emphasis on various MEMS-based systems such as micropumps, micromotors, microvalves, RF MEMS, microaccelerometers, and microfluidics.

10."Digital Holography for MEMS and Microsystem Metrology" by Anand Asundi
“Digital Holography for MEMS and Microsystem Metrology” Book Review: This book discusses the process of digital holography for MEMS and microsystem metrology. It also discusses its applications on MEMS characterization, residual stress measurement, design and evaluation along with device testing and inspection. The book also provides basic concepts of it. This book elaborates the process of digital holography from the perspective of industrial inspection while also systematically analyzing its applications for residual stress measurement, design and evaluation, MEMS characterization, and device testing & inspection. The book seamlessly integrates both theoretical and practical aspects of digital reflection holography, digital transmission holography, digital in-line holography, and digital holographic tomography along with their various applications such as bio-imaging, micro-optical and diffractive optical systems and their testing. Both engineers and researchers can refer to this book to explore the potential of digital holography in existing machines and processes. It illustrates particle characterization with its applications in microfluidics, crystallization and aerosol detection studies.

2. Microelectromechanical Systems

1."Micro Electro Mechanical System Design (Mechanical Engineering)" by James J Allen
“Micro Electro Mechanical System Design (Mechanical Engineering) 1st Edition” Book Review: The book provides in depth information necessary to develop a successful micro electro mechanical system (MEMS) design. The design processes are well illustrated. The materials are also presented in a sequential manner required for MEMS designers to apply them. The topics covered range from understanding the fabrication technologies to focusing on the engineering details. The book has questions and answers at the end of each chapter. It also contains an appendix.

2."MOEMS: Micro-Opto-Electro-Mechanical Systems" by Manouchehr E Motamedi
“MOEMS: Micro-Opto-Electro-Mechanical Systems (SPIE Press Monograph Vol. PM126)” Book Review: This book is designed for graduate students, scientists, and engineers. It introduces the topic of MOEMS. The book provides a complete understanding of this topic which can also be helpful for further developments in research.

3."Slow Rarefied Flows: Theory and Application to Micro-Electro-Mechanical Systems (Progress in Mathematical Physics)" by Carlo Cercignani
“Slow Rarefied Flows: Theory and Application to Micro-Electro-Mechanical Systems (Progress in Mathematical Physics (41))” Book Review: The book briefs usefulness and meaning of the subject the introduction. The basic questions and ways involved in probing mathematical questions have been discussed in this book. It provides understanding of the fundamental mathematical tools. The book has been updated with recent research. It also contains a bibliography for future references.

4."Smart Materials Fabrication and Materials for Micro-Electro-Mechanical Systems: Volume 276 (MRS Proceedings)" by A Peter Jardine and Andrew Crowson
“Smart Materials Fabrication and Materials for Micro-Electro-Mechanical Systems: Volume 276 (MRS Proceedings) 1st Edition” Book Review: This internationally recognized text would be ideal for researchers and practitioners.

5."Fabrication Techniques for III-V Micro-Opto-Electro-Mechanical Systems" by Jeremy A Raley
“Fabrication Techniques for III-V Micro-Opto-Electro-Mechanical Systems” Book Review: The book exploited the different ways for selective removal of semiconductor material in AlxGa1-xAs systems. The book presents case studies have been provided to explain the fabrication process in detail.



1."Rf Mems: Theory, Design, and Technology" by Gabriel M Rebeiz
“Rf Mems: Theory, Design, and Technology” Book Review: This is an introductory book on the basics of this subject. It explains how to design practical circuits and devices. Applications are presented.

2."RF MEMS Switches and Integrated Switching Circuits (MEMS Reference Shelf)" by Ai-Qun Liu
“RF MEMS Switches and Integrated Switching Circuits (MEMS Reference Shelf)” Book Review: This book is based on the research papers existing on the subject. It is a combined approach. It includes RF MEMS approaches. It presents developments from RF MEMS switches to RF switching circuits and MEMS switch components in circuit systems. Engineering innovation, design, modeling and fabrication are discussed. It includes the control and experimental experimentation. RF switch system and component-level circuit integration is discussed. Micro- and nano-fabrication techniques are used.Importance is given to design innovation and experiments This book is for engineers, researchers and students working in the fields of MEMS, circuits and systems and RFs.

3."Practical MEMS: Analysis and Design of Microsystems, MEMS Sensors" by Ville Kaajakari
4."Mixed-Domain Simulation and Wafer-Level Packaging of RF-Mems Devices" by Jacopo Iannacci and Roberto Gaddi
“Mixed-Domain Simulation and Wafer-Level Packaging of RF-Mems Devices” Book Review: Two critical issues of the field are discussed in the book. They are modeling their multi-physical behaviour and the packaging/encapsulation of such devices. For the first issue, development of MEMS behavioural compact models are given. This allows fast and accurate simulations. This happens in commercial IC development frameworks. For the second issue, technology solutions are discussed. Wafer-Level-Packaging approach is taken up. Modeling, simulation and integration of RF-MEMS are described. This book is for Scientists, Researchers, Designers and Technologists in the field.

5."RF-Mems: A Technological Aspect" by Singh Tejinder Pal
“RF-Mems: A Technological Aspect” Book Review: The book is for students and engineers. It can be used at graduate and post graduate level. It presents the basics of the subject in a detailed way. Main objective is to understand the subject in a simple way. Materials, micro fabrication, packaging, market and forecast are given. The book describes prospects of the field in the future. Case studies, diagrams, and tables help in better understanding. This book can be used by students of Physics and Electronics Engineering. It can also be used by researchers.

6."Capacites Variables Et Inductances Mems RF" by Mehdaoui Alexandre
7."RF MEMS Circuit Design for Wireless Communications (Artech House microelectromechanical systems series)" by Hector J de Los Santos
“RF MEMS Circuit Design for Wireless Communications (Artech House microelectromechanical systems series)” Book Review: In this book design of RF MEMS-based circuits are described. Their use in high-performance wireless systems is given. It helps to understand application of the field. Wide variety and performance levels of RF MEMS devices are given. Architecture of wireless systems is given. It helps to get greater system performance with lower power requirements. This book is for microwave engineers and managers. It can be used by electrical engineering professors and students.

8."Advanced RF MEMS (The Cambridge RF and Microwave Engineering Series)" by Stepan Lucyszyn
“Advanced RF MEMS (The Cambridge RF and Microwave Engineering Series)” Book Review: This is the latest and advanced book on the subject. Theory and applications are described. RF MEMS technology is described in an interesting way. It can be used by professionals, researchers, and students as well. Long-standing problems of reliability and packaging are solved. This book helps to combine RF MEMS into commercial products.

4. MEMS and Microsystems Technology

1."Radioisotope Thin-Film Powered Microsystems (MEMS Reference Shelf)" by Rajesh Duggirala and Amit Lal
“Radioisotope Thin-Film Powered Microsystems (MEMS Reference Shelf)” Book Review: This book provides information on energy density microbatteries. These microbatteries are required for compact long lifetime wireless sensor microsystems. The book discusses the theory of high energy density radioisotope thin films. It also discusses novel wireless sensor architecture enabling long lifetime wireless sensors. The book outlines the ultra low power beta radiation counting clocks. It also highlights the application of radioisotope thin films.

2."Design and Manufacturing of Active Microsystems (Microtechnology and MEMS)" by Stephanus Büttgenbach and Arne Burisch
“Design and Manufacturing of Active Microsystems (Microtechnology and MEMS)” Book Review: This book discusses the design and manufacturing of active microsystems along with the technologies developed in collaborative research center 516. This collaborative research is based on the electromagnetic actuator principle. The investigated actuator system travels on the order of several millimeters. The actuator’s total construction size is several centimeters. The research is done based on the models incorporated with the fundamental process chains of microsystems.

3."Surface Tension in Microsystems: Engineering Below the Capillary Length (Microtechnology and MEMS)" by Pierre Lambert
“Surface Tension in Microsystems: Engineering Below the Capillary Length (Microtechnology and MEMS)” Book Review: This book discusses the effects of surface tension on mechanical functions in miniaturized products (<1 mm). It also discusses the effects of capillary bridges on solids where forces and torques are exerted statically and dynamically. The book discusses various applications such as capillary adhesion, centering force in packaging, micro assembly and capillary motor. It illustrates the use of surface tension on actuation, sealing and tightness, energy harvesting, etc,. [book_in id=3642375510 asin=3642375510 link=5e23398389d71c61697c77267feb853b] [book_us id=B00EWC0JXA asin=B00EWC0JXA link=1ba6f3eb57dfb4ea7277d56f253dc0e6] [book_title num=4 title="Optimal Synthesis Methods for MEMS (Microsystems)" author="S G K Ananthasuresh"] “Optimal Synthesis Methods for MEMS (Microsystems)” Book Review: This book discusses the various applications of MEMS in areas such as mechanical and inertial sensors, optical projection displays, biology and medicine. The book emphasizes the modeling aspect of design. It describes a vague step known as creative thinking to figure out which model to be built. The book includes practical examples illustrating characteristics of successful designs. [book_in id=1402076207 asin=1402076207 link=24f062b1952477647227b3198a5fa49f] [book_us id=1461351014 asin=1461351014 link=7b29c6b8f2b1a6ff1b25005a67536e4e] [book_title num=5 title="Piezoelectric MEMS Resonators (Microsystems and Nanosystems)" author="Harmeet Bhugra and Gianluca Piazza"] “Piezoelectric MEMS Resonators (Microsystems and Nanosystems)” Book Review: This book provides information on piezoelectric MEMS resonators. The book is designed for engineers, graduate students and researchers. It discusses design techniques such as use of finite element modeling, testing and qualification of resonators. The book covers chapters on piezoelectric materials along with the principles of operation and design approaches. It also includes examples on the practical implementation of piezoelectric devices. The book also discusses the large-scale manufacturing approaches. [book_in id=3319286862 asin=3319286862 link=dcd19c5fe139ebfbebb1cd6ea48fd8af] [book_us id=3319286862 asin=3319286862 link=631ece3e67af977ed8146b344669d124] [book_title num=6 title="Bonding in Microsystem Technology (Springer Series in Advanced Microelectronics)" author="Jan A Dziuban"] “Bonding in Microsystem Technology (Springer Series in Advanced Microelectronics)” Book Review: This book discusses in detail the bonding techniques in microsystem technology. It describes silicon or glass microsystems which are developed by deep wet etching. The book also presents technological results which are experimented by some researchers. The book can also be used by students interested in microsystem technology. [book_in id=1402045786 asin=1402045786 link=2556b35501b3c05601db0c313d486a0e] [book_us id=9048171512 asin=9048171512 link=1434d51e8272ab0369d802d44df9764b]

5. MEMS and Applications

1."Mems and Moems Technology and Applications" by Choudhury and Rai
“Mems and Moems Technology and Applications” Book Review: This book contains details in design and process of MEMS and MOEMS technologies. It first discusses a wide range of possibilities micromachining technology offers. Next, it reviews the operation and the design of micromachines using devices such as sensors and actuators. Then, it reviews the growth of TCAD and modeling capabilities for MEMS and MOEMS. It describes the development of digital light processing technology. It also discusses the emerging technology of guided wave MOEMS and planar waveguides. Towards the end, it provides an in-depth treatment of the critical subject of assembly and test for MEMS and MOEMS.

2."Amorphous Silicon Carbide for Mems Applications" by Arnab Choudhury
“Amorphous Silicon Carbide for Mems Applications” Book Review: This book covers the development of MEMS fabrication techniques for amorphous Silicon Carbide (a-SiC). It illustrates the extensive applicability of a-SiC to a wide variety of MEMS applications. This is because a-Sic has high Young’s Modulus and chemical resistivity to most common MEMS etchants. This book also lists methods for patterning a-SiC. It also explores integration of a-SiC based MEMS devices with Stereolithography. It uses the test case of a microscaled four point probe to show the applicability of a-Sic to MEMS.

3."MEMS: Applications (The MEMS Handbook, Second Edition)" by Mohamed Gad-el-Hak
“MEMS: Applications (The MEMS Handbook, Second Edition)” Book Review: This book provides a focused, authoritative treatment of specific areas of interest of microelectromechanical systems (MEMS). It covers a wide overview of current, emerging, and possible future MEMS applications. It explores inertial sensors, micromachined pressure sensors, surface micromachined devices, microscale vacuum pumps, etc. It also provides an insight into reactive control for skin-friction reduction and microchannel heat sinks. Some other topics discussed include microactuators and nonlinear electrokinetic devices. It includes numerous case studies, examples, figures and illustrations for better grasping of the concepts.

4."CMOS Cantilever Sensor Systems: Atomic Force Microscopy and Gas Sensing Applications (Microtechnology and MEMS)" by D Lange and O Brand
“CMOS Cantilever Sensor Systems: Atomic Force Microscopy and Gas Sensing Applications (Microtechnology and MEMS)” Book Review: This book introduces the use of industrial CMOS processes to produce arrays of nanomechanical cantilever transducers with on-chip driving and signal conditioning circuitry. It provides useful information on cantilever sensors and resonant sensors in general. It introduces the development of cantilever-based sensor systems using CMOS-compatible micromachining from the design concepts and simulations to the prototype. It explores the combinational potential of IC fabrication technology, notably CMOS technology, and silicon micromachining. It describes post-processing micro- or nano- machining of finished CMOS wafers. It also discusses the use of resonant cantilevers for the mass-sensitive detection of volatile organic compounds, and force sensor arrays for parallel Scanning Atomic Force Microscopy (AFM) of large areas.

5."Electronic Composites: Modeling, Characterization, Processing, and MEMS Applications" by Minoru Taya
“Electronic Composites: Modeling, Characterization, Processing, and MEMS Applications” Book Review: This book explains the processing, simulation, and applications of electronic composites. It speaks about electronic composites which play an important role in micro- and nano-electromechanical systems (MEMS/NEMS). It shows how their properties can be controlled by thermal or electromagnetic means. This is first done by review of the mechanical, thermal, electromagnetic and coupling behaviour of electronic composites. Their applications have been discussed next and then, key simulation models have been described. Towards the end, electronic composite processing, including MEMS design and packaging has been put focus upon.

6."Thermal Energy Harvesting for Application at MEMS Scale (SpringerBriefs in Electrical and Computer Engineering)" by Alex Post and Tim Moore
“Thermal Energy Harvesting for Application at MEMS Scale (SpringerBriefs in Electrical and Computer Engineering)” Book Review: It is a comprehensive text covering the history of thermal heat generators. This book focuses on the potential for these processes using micro-electrical mechanical systems (MEMS) technology for this application. It demonstrates how to capture waste thermal energy to generate usable electrical powers. It discusses sources of waste thermal energy such as industrial processes, transport systems or the human body. It explores external combustion heat cycles at MEMS ( Brayton, Stirling and Rankine), Thermoacoustic, Shape Memory Alloys (SMAs), Multiferroics, Thermionics, Pyroelectric, etc. Some other topics covered include Seebeck, Alkali Metal Thermal, Hydride Heat Engine, and some more.

7."MEMS-Based Integrated Navigation (GNSS Technology and Applications)" by Priyanka Aggarwal and Zainab Syed
“MEMS-Based Integrated Navigation (GNSS Technology and Applications)” Book Review: This book demonstrates how to minimize the cost of MEMS by adding and removing inertial sensors. Initially, it provides an introduction to MEMS navigation related applications. It covers special topics on Alignment for MEMS-Based Navigation. Extended Kalman Filter is discussed in detail. The practical references present in this book provide various integration strategies with examples from real field tests. It majorly focuses on the application of MEMS inertial sensors to navigation systems.

8."Principles and Applications of Nano MEMS Physics" by Hector J De Los Santos
“Principles and Applications of Nano MEMS Physics” Book Review: The text within covers the physical principles at the heart of Nano MEMS-based devices and applications. It first lays the fundamentals and limitations of nanotechnology and MEMS fabrication techniques. It then marks the physics germane to quantum wave-particle phenomena, including, the manifestation of charge discreteness, quantized electrostatic actuation and the Casimir effect. Quantum wave phenomena, including, quantized electrical conductance, quantum interference, Luttinger liquids, quantum entanglement, superconductivity and cavity quantum electrodynamics have also been addressed here. Next, it studies potential building blocks for Nano MEMS applications, including nano electromechanical quantum circuits and systems such as charge detectors, the which-path electron interferometer and the Casimir oscillator. In the end, Nano MEMS applications in photonics have been discussed.

9."RF MEMS and Their Applications" by K J Vinoy and Vijay K Varadan
“RF MEMS and Their Applications” Book Review: This book highlights the overlapping information requirements of the RF and MEMS research and development communities. It first provides an introduction to micromachining techniques. Next, it states their use in the fabrication of micro switches, capacitors and inductors. It also explores MEMS devices for wireless and Bluetooth enabled systems. This book can help the reader in RF Circuit Design. It discusses the development of RF MEMS switches and the attempts to reduce their actuation voltage. Technology behind micromachined antennas has been revealed. Design and development of RF MEMS based inductors, capacitors, filters and phase shifters has been given.

10."MEMS: Fundamental Technology and Applications (Devices, Circuits, and Systems)" by Vikas Choudhary and Krzysztof Iniewski
“MEMS: Fundamental Technology and Applications (Devices, Circuits, and Systems)” Book Review: This book explains the theoretical background and supplies practical insights on applying the technology of MEMS. It spans areas of interest from the historical evolution of nano micro systems to recent trends. The book identifies challenges and poses questions that need to be resolved. It discusses thin-film integrated passives as an alternative to discrete passives and the possibility of piezoelectric MEMS. It also discusses Solutions for MEMS gyroscopes, advanced interconnect technologies, ambient energy harvesting, bulk acoustic wave resonators, ultrasonic receiver arrays using MEMS sensors, optical MEMS-based spectrometers, etc. Some other topics covered include wireless microactuators to enable implantable MEMS devices for drug delivery, MEMS technologies for tactile sensing and actuation in robotics, MEMS-based micro hot-plate devices, and many more.

We have put a lot of effort into researching the best books on Microelectromechanical Systems (MEMS) and came out with a recommended list and their reviews. If any more book needs to be added to this list, please email us. We are working on free pdf downloads for books on Microelectromechanical Systems (MEMS) and will publish the download link here. Fill out this Microelectromechanical Systems (MEMS) books pdf download" request form for download notification.

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