Best Books – MEMS and Applications

We have compiled the list of Top 10 Best Reference Books on MEMS and Applications subject. These books are used by students of top universities, institutes and colleges. Here is the full list of top 10 best books on MEMS and Applications along with reviews.

Kindly note that we have put a lot of effort into researching the best books on MEMS and Applications subject and came out with a recommended list of top 10 best books. The table below contains the Name of these best books, their authors, publishers and an unbiased review of books on "MEMS and Applications" as well as links to the Amazon website to directly purchase these books. As an Amazon Associate, we earn from qualifying purchases, but this does not impact our reviews, comparisons, and listing of these top books; the table serves as a ready reckoner list of these best books.

1. “Mems and Moems Technology and Applications” by Choudhury and Rai

“Mems and Moems Technology and Applications” Book Review: This book contains details in design and process of MEMS and MOEMS technologies. It first discusses a wide range of possibilities micromachining technology offers. Next, it reviews the operation and the design of micromachines using devices such as sensors and actuators. Then, it reviews the growth of TCAD and modeling capabilities for MEMS and MOEMS. It describes the development of digital light processing technology. It also discusses the emerging technology of guided wave MOEMS and planar waveguides. Towards the end, it provides an in-depth treatment of the critical subject of assembly and test for MEMS and MOEMS.

2. “Amorphous Silicon Carbide for Mems Applications” by Arnab Choudhury

“Amorphous Silicon Carbide for Mems Applications” Book Review: This book covers the development of MEMS fabrication techniques for amorphous Silicon Carbide (a-SiC). It illustrates the extensive applicability of a-SiC to a wide variety of MEMS applications. This is because a-Sic has high Young’s Modulus and chemical resistivity to most common MEMS etchants. This book also lists methods for patterning a-SiC. It also explores integration of a-SiC based MEMS devices with Stereolithography. It uses the test case of a microscaled four point probe to show the applicability of a-Sic to MEMS.

3. “MEMS: Applications (The MEMS Handbook, Second Edition)” by Mohamed Gad-el-Hak

“MEMS: Applications (The MEMS Handbook, Second Edition)” Book Review: This book provides a focused, authoritative treatment of specific areas of interest of microelectromechanical systems (MEMS). It covers a wide overview of current, emerging, and possible future MEMS applications. It explores inertial sensors, micromachined pressure sensors, surface micromachined devices, microscale vacuum pumps, etc. It also provides an insight into reactive control for skin-friction reduction and microchannel heat sinks. Some other topics discussed include microactuators and nonlinear electrokinetic devices. It includes numerous case studies, examples, figures and illustrations for better grasping of the concepts.

4. “CMOS Cantilever Sensor Systems: Atomic Force Microscopy and Gas Sensing Applications (Microtechnology and MEMS)” by D Lange and O Brand

“CMOS Cantilever Sensor Systems: Atomic Force Microscopy and Gas Sensing Applications (Microtechnology and MEMS)” Book Review: This book introduces the use of industrial CMOS processes to produce arrays of nanomechanical cantilever transducers with on-chip driving and signal conditioning circuitry. It provides useful information on cantilever sensors and resonant sensors in general. It introduces the development of cantilever-based sensor systems using CMOS-compatible micromachining from the design concepts and simulations to the prototype. It explores the combinational potential of IC fabrication technology, notably CMOS technology, and silicon micromachining. It describes post-processing micro- or nano- machining of finished CMOS wafers. It also discusses the use of resonant cantilevers for the mass-sensitive detection of volatile organic compounds, and force sensor arrays for parallel Scanning Atomic Force Microscopy (AFM) of large areas.

5. “Electronic Composites: Modeling, Characterization, Processing, and MEMS Applications” by Minoru Taya

“Electronic Composites: Modeling, Characterization, Processing, and MEMS Applications” Book Review: This book explains the processing, simulation, and applications of electronic composites. It speaks about electronic composites which play an important role in micro- and nano-electromechanical systems (MEMS/NEMS). It shows how their properties can be controlled by thermal or electromagnetic means. This is first done by review of the mechanical, thermal, electromagnetic and coupling behaviour of electronic composites. Their applications have been discussed next and then, key simulation models have been described. Towards the end, electronic composite processing, including MEMS design and packaging has been put focus upon.

6. “Thermal Energy Harvesting for Application at MEMS Scale (SpringerBriefs in Electrical and Computer Engineering)” by Alex Post and Tim Moore

“Thermal Energy Harvesting for Application at MEMS Scale (SpringerBriefs in Electrical and Computer Engineering)” Book Review: It is a comprehensive text covering the history of thermal heat generators. This book focuses on the potential for these processes using micro-electrical mechanical systems (MEMS) technology for this application. It demonstrates how to capture waste thermal energy to generate usable electrical powers. It discusses sources of waste thermal energy such as industrial processes, transport systems or the human body. It explores external combustion heat cycles at MEMS ( Brayton, Stirling and Rankine), Thermoacoustic, Shape Memory Alloys (SMAs), Multiferroics, Thermionics, Pyroelectric, etc. Some other topics covered include Seebeck, Alkali Metal Thermal, Hydride Heat Engine, and some more.

7. “MEMS-Based Integrated Navigation (GNSS Technology and Applications)” by Priyanka Aggarwal and Zainab Syed

“MEMS-Based Integrated Navigation (GNSS Technology and Applications)” Book Review: This book demonstrates how to minimize the cost of MEMS by adding and removing inertial sensors. Initially, it provides an introduction to MEMS navigation related applications. It covers special topics on Alignment for MEMS-Based Navigation. Extended Kalman Filter is discussed in detail. The practical references present in this book provide various integration strategies with examples from real field tests. It majorly focuses on the application of MEMS inertial sensors to navigation systems.

8. “Principles and Applications of Nano MEMS Physics” by Hector J De Los Santos

“Principles and Applications of Nano MEMS Physics” Book Review: The text within covers the physical principles at the heart of Nano MEMS-based devices and applications. It first lays the fundamentals and limitations of nanotechnology and MEMS fabrication techniques. It then marks the physics germane to quantum wave-particle phenomena, including, the manifestation of charge discreteness, quantized electrostatic actuation and the Casimir effect. Quantum wave phenomena, including, quantized electrical conductance, quantum interference, Luttinger liquids, quantum entanglement, superconductivity and cavity quantum electrodynamics have also been addressed here. Next, it studies potential building blocks for Nano MEMS applications, including nano electromechanical quantum circuits and systems such as charge detectors, the which-path electron interferometer and the Casimir oscillator. In the end, Nano MEMS applications in photonics have been discussed.

9. “RF MEMS and Their Applications” by K J Vinoy and Vijay K Varadan

“RF MEMS and Their Applications” Book Review: This book highlights the overlapping information requirements of the RF and MEMS research and development communities. It first provides an introduction to micromachining techniques. Next, it states their use in the fabrication of micro switches, capacitors and inductors. It also explores MEMS devices for wireless and Bluetooth enabled systems. This book can help the reader in RF Circuit Design. It discusses the development of RF MEMS switches and the attempts to reduce their actuation voltage. Technology behind micromachined antennas has been revealed. Design and development of RF MEMS based inductors, capacitors, filters and phase shifters has been given.

10. “MEMS: Fundamental Technology and Applications (Devices, Circuits, and Systems)” by Vikas Choudhary and Krzysztof Iniewski

“MEMS: Fundamental Technology and Applications (Devices, Circuits, and Systems)” Book Review: This book explains the theoretical background and supplies practical insights on applying the technology of MEMS. It spans areas of interest from the historical evolution of nano micro systems to recent trends. The book identifies challenges and poses questions that need to be resolved. It discusses thin-film integrated passives as an alternative to discrete passives and the possibility of piezoelectric MEMS. It also discusses Solutions for MEMS gyroscopes, advanced interconnect technologies, ambient energy harvesting, bulk acoustic wave resonators, ultrasonic receiver arrays using MEMS sensors, optical MEMS-based spectrometers, etc. Some other topics covered include wireless microactuators to enable implantable MEMS devices for drug delivery, MEMS technologies for tactile sensing and actuation in robotics, MEMS-based micro hot-plate devices, and many more.

People who are searching for Free downloads of books and free pdf copies of these top 10 books on MEMS and Applications – we would like to mention that we don’t have free downloadable pdf copies of these good books and one should look for free pdf copies from these Authors only if they have explicitly made it free to download and read them.

We have created a collection of best reference books on "MEMS and Applications" so that one can readily see the list of top books on "MEMS and Applications" and buy the books either online or offline.

If any more book needs to be added to the list of best books on MEMS and Applications subject, please let us know.

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Manish Bhojasia, a technology veteran with 20+ years @ Cisco & Wipro, is Founder and CTO at Sanfoundry. He lives in Bangalore, and focuses on development of Linux Kernel, SAN Technologies, Advanced C, Data Structures & Alogrithms. Stay connected with him at LinkedIn.

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