There are lots of great material on VLSI Technology subject in the internet, buts its always a challenge to figure out a ready list of top books on VLSI Technology that one can refer to immediately. Even though online materials are good, but nothing can beat the depth of coverage that a book can offer. Hence, we researched the list of VLSI Technology books which are used by students worldwide and came up with top 10 Book Recommendations on VLSI Technology subject. These books can be used as a great starting point for anyone studying VLSI Technology and can also be used as a ready reference for Under-Graduate and Post-Graduate programs.
Most of these VLSI Technology books are also in the best-seller lists in Amazon website. We have added a brief description of these best books and have also included direct links to Amazon site (as affiliate). This allows anyone to directly visit the site and order printed copies of these best books.
Here is the full list of best reference books on VLSI Technology.
|1. “Silicon VLSI Technology: Fundamentals, Practice and Modeling” by James D.Plummer, Michael D.Deal, Peter B.Griffin
Book Review: This book provides an integrated view of silicon technology thereby focusing on modern computer simulation. The book provides a description about the manufacturing practice, silicon chip fabrication technologies and their scientific usage. The various topics covered in the book include modern CMOS technology, crystal growth, silicon wafers basic properties, semiconductor manufacturing, wafer cleaning, gettering, lithography, thermal oxidation, dopant diffusion, ion implantation and many others. This is an excellent book for people interested in fabrication processes.
|2. “The Science and Engineering of Microelectronic Fabrication” by Stephen A. Campbell
Book Review: This is a very good textbook for graduate and undergraduate courses in the field of microelectronic fabrication. The book covers basic unit processes that are used to fabricate integrated circuits which include photolithography, plasma and reactive ion etching, ion implantation, diffusion, oxidation, evaporation, sputtering and chemical vapor deposition.
The book also covers advanced topics like rapid thermal processing, lithography, molecular beam epitaxy, technologies like CMOS, double poly bipolar and MESFETs.
|3. “VLSI Technology” by C.Y. Chang and S.M.Sze
Book Review: The major emphasis of this book is on fabrication. The book contains newer chapters on wafer cleaning and clean room technology. The book also contains chapters on planarization, process integration chapters, metallization and process integration. The book is a collection of readings by various authorities in VLSI technology. Most of the chapters in the book contain 50-100 references to literature. The book is very useful for undergraduate and graduate students in the field of VLSI technology.
|4. ” VLSI Technology” by S.M. Sze
Book Review: This is a very good textbook for senior level and graduate courses in ULSI technology. The book covers latest advancements in the field of microelectronic chip fabrication. The book demonstrates how computer chips are essential for the next generation of ULSI technologies thereby letting more transistors to be packaged on a single chip. The book contains chapters on epitaxy with low temperature processes, rapid thermal processes, fine line lithography, clean room and cleaning technology and many others.
|5. “Multilayer Ceramic Substrate – Technology for VLSI Package/Multichip Module: Ceramic Research and Development in Japan” by Kanji Otsuka K Otsuka Otsuka|
|6. “Low Power Phase Locked Loop with Multiple Output Using VLSI Technology” by Ladhake Siddharth A., Belorkar Ujwala A.|
|7. ” VLSI Technology: Fundamentals and Applications” by Yasuo Tarui|
|8. “VLSI Signal Processing Technology” by Magdy A Bayoumi M. SC. Ph. D. Bayoumi Swartzlander|
|9. “Introduction to VLSI Silicon Devices: Physics, Technology and Characterization” by R J Bombard Badih El-Kareh Bombard El-Kareh|
|10. “Dry Etching for VLSI” by S J H Brader J A G Baggerman A J Van Roosmalen Brader Baggerman Van Roosmalen Roosmalen|
If any more book needs to be added to the list of best books on VLSI Technology Subject, please let us know.
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