Here is the listing of Best reference books on VLSI Technology.
|1. “Silicon VLSI Technology: Fundamentals, Practice and Modeling” by James D.Plummer, Michael D.Deal, Peter B.Griffin
Book Review: This book provides an integrated view of silicon technology thereby focusing on modern computer simulation. The book provides a description about the manufacturing practice, silicon chip fabrication technologies and their scientific usage. The various topics covered in the book include modern CMOS technology, crystal growth, silicon wafers basic properties, semiconductor manufacturing, wafer cleaning, gettering, lithography, thermal oxidation, dopant diffusion, ion implantation and many others. This is an excellent book for people interested in fabrication processes.
|2. “The Science and Engineering of Microelectronic Fabrication” by Stephen A. Campbell
Book Review: This is a very good textbook for graduate and undergraduate courses in the field of microelectronic fabrication. The book covers basic unit processes that are used to fabricate integrated circuits which include photolithography, plasma and reactive ion etching, ion implantation, diffusion, oxidation, evaporation, sputtering and chemical vapor deposition.
The book also covers advanced topics like rapid thermal processing, lithography, molecular beam epitaxy, technologies like CMOS, double poly bipolar and MESFETs.
|3. “VLSI Technology” by C.Y. Chang and S.M.Sze
Book Review: The major emphasis of this book is on fabrication. The book contains newer chapters on wafer cleaning and clean room technology. The book also contains chapters on planarization, process integration chapters, metallization and process integration. The book is a collection of readings by various authorities in VLSI technology. Most of the chapters in the book contain 50-100 references to literature. The book is very useful for undergraduate and graduate students in the field of VLSI technology.
|4. ” VLSI Technology” by S.M. Sze
Book Review: This is a very good textbook for senior level and graduate courses in ULSI technology. The book covers latest advancements in the field of microelectronic chip fabrication. The book demonstrates how computer chips are essential for the next generation of ULSI technologies thereby letting more transistors to be packaged on a single chip. The book contains chapters on epitaxy with low temperature processes, rapid thermal processes, fine line lithography, clean room and cleaning technology and many others.
Sanfoundry Global Education & Learning Series – Best Reference Books!