Here is the full list of best reference books on VLSI Technology.
We have put a lot of effort into researching the best books for reference on this subject and came out with a recommended list of best books. The table below contains a review of these books and links to the Amazon website to directly purchase these books. As an Amazon Associate, we earn from qualifying purchases, but this does not impact our reviews, comparisons, and listing of these books; the table serves as a ready reckoner list of these best books.
|1. “Silicon VLSI Technology: Fundamentals, Practice and Modeling” by James DPlummer and Michael D Deal
Book Review: This book provides an integrated view of silicon technology thereby focusing on modern computer simulation. The book provides a description about the manufacturing practice, silicon chip fabrication technologies and their scientific usage. The various topics covered in the book include modern CMOS technology, crystal growth, silicon wafers basic properties, semiconductor manufacturing, wafer cleaning, gettering, lithography, thermal oxidation, dopant diffusion, ion implantation and many others. This is an excellent book for people interested in fabrication processes.
|2. “The Science and Engineering of Microelectronic Fabrication” by Stephen A Campbell
Book Review: This is a very good textbook for graduate and undergraduate courses in the field of microelectronic fabrication. The book covers basic unit processes that are used to fabricate integrated circuits which include photolithography, plasma and reactive ion etching, ion implantation, diffusion, oxidation, evaporation, sputtering and chemical vapor deposition.
The book also covers advanced topics like rapid thermal processing, lithography, molecular beam epitaxy, technologies like CMOS, double poly bipolar and MESFETs.
|3. “VLSI Technology” by C Y Chang and S M Sze
Book Review: The major emphasis of this book is on fabrication. The book contains newer chapters on wafer cleaning and clean room technology. The book also contains chapters on planarization, process integration chapters, metallization and process integration. The book is a collection of readings by various authorities in VLSI technology. Most of the chapters in the book contain 50-100 references to literature. The book is very useful for undergraduate and graduate students in the field of VLSI technology.
|4. “VLSI Technology” by S M Sze
Book Review: This is a very good textbook for senior level and graduate courses in ULSI technology. The book covers latest advancements in the field of microelectronic chip fabrication. The book demonstrates how computer chips are essential for the next generation of ULSI technologies thereby letting more transistors to be packaged on a single chip. The book contains chapters on epitaxy with low temperature processes, rapid thermal processes, fine line lithography, clean room and cleaning technology and many others.
| 5. “Multilayer Ceramic Substrate – Technology for VLSI Package/Multichip Module: Ceramic Research and Development in Japan” by Kanji Otsuka K Otsuka Otsuka
“Multilayer Ceramic Substrate – Technology for VLSI Package/ Multichip Module: Ceramic Research and Development in Japan” Book Review: This book covers the basics of electronic ceramics, translated from an important Japanese work, and also includes a lot of experimental data. The amount of research presented in this book makes it suitable for ceramicists and electronic engineers working with ceramic materials.
| 6. “Low Power Phase Locked Loop with Multiple Output Using VLSI Technology” by Ladhake Siddharth A and Belorkar Ujwala A
“Low Power Phase Locked Loop with Multiple Output using VLSI Technology” Book Review: This book analyzes the proposal to design a highly efficient, optimum area chip with low power (0.211 mwatt), phase locked loop with multiple output, using 45nm CMOS/VLSI technology with microwind 3.1. Four multiple outputs as PLL8x, PLL4x, PLL2x, & PLL1x of 3.3 GHz,1.65 GHz, 0.825 GHz, and 0.412 GHz respectively are obtained. A 25 nn effective gate length is required for 45 nm technology. Both students and professionals may refer to this book.
| 7. “VLSI Technology: Fundamentals and Applications” by Yasuo Tarui
“VLSI Technology: Fundamentals and Applications” Book Review: This book summarizes the results of the research performed by the Japanese VLSI Technical Association. It focused on silicon as the major basis of modern semiconductor devices. The results presented are on microfabrication technology, the electron-beam concept, the required software, the pattern transfer method, and the problem of photo-resist for both electron-beam and X-ray illumination.
| 8. “VLSI Signal Processing Technology” by Magdy A Bayoumi M SC Ph and D Bayoumi Swartzlander
“VLSI Signal Processing Technology” Book Review: This book introduces the fundamental features of VLSI Signal Processing and the recent advances made in that field. Several case studies and examples of Digital Signal Processing (DSP) processors and their architectures have been included to further clarify the developments made in that area. Impact on the performance of DSP processors due to arithmetic circuitry, such as number representation, arithmetic algorithms and circuits, and implementation, is also explained. A separate chapter deals with the main features and requirements of image and video signal processing architectures where both programmable image processors and applications specific integrated circuits (ASICs) aare analyzed. Consumer electronics including multimedia, teleconferencing, and other new market areas are also described for signal processing.
| 9. “Introduction to VLSI Silicon Devices: Physics, Technology and Characterization” by R J Bombard Badih El-Kareh Bombard El-Kareh
“Introduction to VLSI Silicon Devices: Physics, Technology and Characterization” Book Review: This book provides a thorough treatment of the underlying principles of silicon devices along with a brief explanation of the equations underlying their device operation and characteristics. Practical cases involving application of solid state theory to device analysis and synthesis have been used to demonstrate solved examples and problems. The numerous illustrations provided helps tackle the characterization of real devices as well as relating the measured data to device physics and process parameters. This book is suitable for new engineers, as well as practicing engineers and advanced laboratory personnel in the field of semiconductors.
| 10. “Dry Etching for VLSI” by S J H Brader
“Dry Etching for VLSI” Book Review: This book provides a complete overview of all the fundamental aspects of dry (plasma) etching for silicon semiconductor processing, ranging from systems and processes to tools and applications of etching with glass plasmas for VLSI. The advantages and disadvantages of reactor concepts and excitation frequency ranges are explained using electrical engineering concepts. Detailed examples and experiments are provided to unify the theoretical and practical aspects of this field.
People who are searching for Free downloads of books and free pdf copies of these books – “Silicon VLSI Technology: Fundamentals, Practice and Modeling” by James D Plummer and Michael D Deal, “The Science and Engineering of Microelectronic Fabrication” by Stephen A Campbell, “VLSI Technology” by C Y Chang and S M Sze, “VLSI Technology” by S M Sze, “Multilayer Ceramic Substrate – Technology for VLSI Package/Multichip Module: Ceramic Research and Development in Japan” by Kanji Otsuka K Otsuka Otsuka, “Low Power Phase Locked Loop with Multiple Output Using VLSI Technology” by Ladhake Siddharth A and Belorkar Ujwala A, “VLSI Technology: Fundamentals and Applications” by Yasuo Tarui, “VLSI Signal Processing Technology” by Magdy A Bayoumi M SC Ph and D Bayoumi Swartzlander, “Introduction to VLSI Silicon Devices: Physics, Technology and Characterization” by R J Bombard Badih El-Kareh Bombard El-Kareh, “Dry Etching for VLSI” by S J H Brader – we would like to mention that we don’t have free downloadable pdf copies of these good books and one should look for free pdf copies from these Authors only if they have explicitly made it free to download and read them.
We have created a collection of best reference books on “VLSI Technology” so that one can readily see the list of top books on “VLSI Technology” and buy the books either online or offline.
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