Here is the listing of Best reference books on Introduction to MEMS.
|1. “Microsystem Design” by Stephen D. Senturia
Book Review: This book brings together all the aspects of microsystem design thereby addressing the complex range of problems that are involved in reducing entire systems to the micro and nano domains. The book demonstrates the technology to form integrated sensors. The book describes integrated MOS photodiode arrays that are used for visible imaging, silicon etching thereby creating thin diaphragms that convert pressure into an electrical signal.
|2. “Fundamentals of Microfabrication” by Marc Madou
Book Review: The book provides complete coverage on MEMS. It includes theoretical and practical information on nanotechnology and MEMS and provides detailed information on materials, processes and manufacturing options. The book also provides demonstration of micro and nano sciences and contains chapters on solid state physics, quantum mechanics, crystallography and fluidics. The book also provides techniques for micro and nano fabrication and covers various forms of lithography, material removal processes and various additive technologies.
|3. “Micromachined Transducers Sourcebook” by Gregory Kovacs
Book Review: The book provides detailed overview of micromachined transducers starting with micromachining approaches and in the later stages covering all the major categories of transduction. The book also provides practical approach to this subject by dealing with key design issues thereby examining the fabrication of different devices. This book is a very good reference book for MEMS researchers and students at the graduate level. The book also provides classification about sensors and actuators.
|4. “Micromechanical Transducers: Pressure Sensors, Accelerometers and Gyroscopes” by M-H. Bao|
Sanfoundry Global Education & Learning Series – Best Reference Books!